APA (7th ed.) Citation

Lin, B. J. (2010). Optical lithography: Here is why. SPIE.

Chicago Style (17th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. Bellingham, Wash.: SPIE, 2010.

MLA (9th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. SPIE, 2010.