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Acoustic wave and electromechanical resonators : concept to key applications /

Bibliographic Details
Main Author:	Campanella, Humberto
Format:	Book
Language:	English
Published:	Boston : Artech House, [2010]
Subjects:	Acoustic surface wave devices. Electric resonators.

Table of Contents:

1. MEMs and NEMs resonator technologies
2. Acoustic microresonator technologies
3. Design and modeling of micro- and nanoresonators
4. Fabrication techniques
5. Characterization techniques
6. Performance optimization
7. Integration of resonator to CMOS technologies
8. Sensor applications
9. Radio frequency applications
10. Case studies.