rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: MEMS
    sub title: a practical guide to design, analysis, and applications
  name:
    name part: Korvink, J. G. (Jan G.)
  name:
    name part: Paul, Oliver.
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    date issued: 2006
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xxv, 965 pages) : illustrations
  abstract: Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ̥smaller, better, cheaper, and faster?̲ If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.
  table of contents: Introduction -- Microtransducer Operation -- Material Properties: Measurement and Data -- MEMS and MEMS Simulation -- System-Level Simulation of Microsystems -- Thermal Based Sensors -- Photon Detectors -- Free-Space Optical MEMS -- Integrated Micro-Optics -- Magnetic Microsensors -- Mechanical Microsensors -- Semiconductor-Based Chemical Microsensors -- Microfluidics -- Biomedical Microsystems -- Microactuators -- Micromachining Technology -- Interface Circuitry and Microsystems -- Index.
  note: edited by Jan G. Korvink and Oliver Paul.
  note: "Micro-electro-mechanical systems"--Cover.
  note: Electronic resource.
  note: Access is restricted to subscribing institutions.
  note: Includes bibliographical references and index.
  subject:
    topic: MEMS
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Electrical engineering
  subject:
    topic: Engineering
  subject:
    topic: Ingénierie
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Mechanical
  classification: TK7875 .M42 2006eb
  classification: 621
  related item:
    title info:
      title: MEMS
    origin info:
      publisher: Norwich, NY : William Andrew Pub. ; Heidelberg, Germany : Springer, c2006
    identifier: (DLC) 2005023492
    identifier: (OCoLC)61362695
  identifier: 0815514972 (William Andrew : alk. paper)
  identifier: 0815518250 (electronic bk.)
  identifier: 0815518285
  identifier: 3540211179 (Springer-Verlag)
  identifier: 3540336559
  identifier: 9780815514978 (William Andrew : alk. paper)
  identifier: 9780815518259 (electronic bk.)
  identifier: 9780815518280
  identifier: 9783540211174 (Springer-Verlag)
  identifier: 9783540336556
  identifier: 978-3-540-21117-4 Springer
  identifier: http://proxy.library.tamu.edu/login
  access condition: Access is restricted to subscribing institutions.
  record info:
    record content source: COO
    record creation date: 050811
    record change date: 20210727154849.0
    record identifier: in00002573063
    language of cataloging:
      language term: eng