Wafer level 3-D ICs process technology /

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Gutmann, Ronald J., Reif, Rafael, Tan, Chuan Seng
Format: eBook
Language:English
Published: New York ; London : Springer, 2008.
Series:Series on integrated circuits and systems.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:pages cm.
ISBN:0387765344
9780387765341
DOI:10.1007/978-0-387-76534-1