Wafer level 3-D ICs process technology /
| Corporate Author: | |
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
New York ; London :
Springer,
2008.
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| Series: | Series on integrated circuits and systems.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | pages cm. |
| ISBN: | 0387765344 9780387765341 |
| DOI: | 10.1007/978-0-387-76534-1 |