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NEMS/MEMS technology and devices : selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July, Singapore /

Bibliographic Details
Corporate Author: International Conference on Materials for Advanced Technologies
Other Authors: Teo, Selin
Format: Conference Proceeding Book
Language:English
Published: Stafa-Zurich ; Enfield, NH : Trans Tech Publications, [2009]
Series:Advanced materials research ; v. 74.
Subjects:
Microelectromechanical systems > Congresses.
Nanoelectromechanical systems > Congresses.
NEMS
MEMS
Devices
ICMAT
Materials
Technology
Advanced technologies
Description
Physical Description:xi, 348 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780878493210 (pbk.)
0878493212 (pbk.)
ISSN:1022-6680 ;