Material systems and processes for three dimensional micro- and nanoscale fabrication and lithography : April 13-17, 2009, San Francisco, California, USA.
| Corporate Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Warrendale, PA :
Materials Research Society,
[2009]
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| Series: | Materials Research Society symposia proceedings ;
v. 1179. |
| Subjects: |
| Item Description: | "Spring 2009."--Cover. "Printed from e-media with permission by: Curran Associates." |
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| Physical Description: | 122 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1615673881 9781615673889 |