Reliability of MEMS /
| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2008]
|
| Series: | Advanced micro & nanosystems ;
v.6. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book Contributor biographical information Publisher description Table of contents only |
| Item Description: | "Testing of materials and devices"--Cover. Electronic resource. |
|---|---|
| Physical Description: | xx, 303 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3527622136 9783527622139 |
| DOI: | 10.1002/9783527622139 |