CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009 /

Bibliographic Details
Corporate Authors:	Materials Research Society. Spring Meeting, Symposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications"
Other Authors:	Demkov, Alexander A.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2009]
Series:	Materials Research Society symposia proceedings ; v. 1155.
Subjects:	Metal oxide semiconductors, Complementary > Congresses. Metal oxide semiconductors > Materials > Congresses. Silicides > Congresses. Gate array circuits > Congresses.

Description
Item Description:	" ... Symposium C, 'CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- preface.
Physical Description:	viii, 179 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	9781605111285 1605111287