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Transport in laser microfabrication : fundamentals and applications /

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Bibliographic Details
Main Author: Grigoropoulos, Costas P.
Format: Book
Language:English
Published: Cambridge ; New York : Cambridge University Press, 2009.
Subjects:
Microfabrication.
Lasers > Industrial applications.
Description
Physical Description:xii, 400 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780521821728
052182172X