rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Thermal characterization of thin films for MEMS applications
  title info:
    title: Thermal characterization of thin films for microelectromechanical systems applications
  name:
    name part: Howe, David J.
    role:
      role term: creator
  name:
    name part: Morgan, Brian.
  name:
    name part: U.S. Army Research Laboratory
  type of resource: text
  origin info:
    place:
      place term: mdu
    date issued: 2008
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    extent: iv, 14 pages : digital, PDF file.
  note: by David J. Howe and Brian Morgan.
  note: Title from title screen (viewed on May 26, 2009).
  note: "February 2008."
  note: Electronic resource.
  note: Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf ; current access is available via PURL.
  subject:
    topic: Microelectromechanical systems
  classification: D 101.133:4378
  related item:
    title info:
      title: ARL-TR (Aberdeen Proving Ground, Md.) ; 4378
  identifier: https://purl.fdlp.gov/GPO/LPS113054
  record info:
    record content source: GPO
    record creation date: 090526
    record change date: 20211202191710.0
    record identifier: in00002494959