Cover Image

Thermal characterization of thin films for MEMS applications /

Bibliographic Details
Main Author: Howe, David J.
Corporate Author: U.S. Army Research Laboratory
Other Authors: Morgan, Brian
Format: Government Document Book
Language:English
Published: Adelphi, Md. : Army Research Laboratory, [2008]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 4378.
Subjects:
Microelectromechanical systems.
Online Access:https://purl.fdlp.gov/GPO/LPS113054
Description
Item Description:Title from title screen (viewed on May 26, 2009).
"February 2008."
Electronic resource.
Physical Description:iv, 14 pages : digital, PDF file.
Format:Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf ; current access is available via PURL.