rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: LIGA and its applications
  name:
    name part: Saile, Volker.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2009
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: x, 479 pages : illustrations ; 25 cm.
  note: edited by Volker Saile [and others].
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Microtechnology
  classification: 621.381
  related item:
    title info:
      title: Advanced micro & nanosystems ; 7
  identifier: 9783527316984 (hbk.)
  identifier: 3527316981 (hbk.)
  record info:
    record content source: UKM
    record creation date: 071220
    record change date: 20151110072148.0
    record identifier: in00002488910