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LIGA and its applications /

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Bibliographic Details
Other Authors: Saile, Volker
Format: Book
Language:English
Published: Weinheim : Wiley-VCH, [2009]
Series:Advanced micro & nanosystems ; 7.
Subjects:
Microelectromechanical systems.
Microtechnology.
Description
Physical Description:x, 479 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9783527316984 (hbk.)
3527316981 (hbk.)