rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micromachined thin-film sensors for SOI-CMOS co-integration
  name:
    name part: Laconte, J.
    role:
      role term: creator
  name:
    name part: Flandre, Denis.
  name:
    name part: Raskin, J.-P.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: ne
    date issued: 2006
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: remote
    extent: xiii, 292 pages : illustrations ; 25 cm.
  note: by J. Laconte, D. Flandre and J.P. Raskin.
  note: Electronic resource.
  note: Electronic reproduction. New York : Springer, 2008. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Jan. 30, 2008). Access may be restricted to users at subscribing institutions.
  note: Includes bibliographical references and index.
  subject:
    topic: Gas flow
  subject:
    topic: Metal oxide semiconductors, Complementary
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Thin film devices
  classification: QC168 .L33 2006eb
  classification: 621.3815/2
  related item:
    identifier: (DLC) 2006279460
    identifier: (OCoLC)68079553
  identifier: 0387288430
  identifier: 9780387288437
  identifier: 978-0-387-28842-0 Springer
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: GW5XE
    record creation date: 080226
    record change date: 20210817091423.0
    record identifier: in00002473325