MEMS/NEMS : handbook techniques and applications /

Bibliographic Details
Corporate Author:	SpringerLink (Online service)
Other Authors:	Leondes, Cornelius T.
Format:	eBook
Language:	English
Published:	New York : Springer, [2006]
Subjects:	Microelectromechanical systems > Design and construction. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book Publisher description

Description
Item Description:	Electronic resource.
Physical Description:	5 volumes : illustrations ; 25 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0387257861 9780387257860
DOI:	10.1007/b136111