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Mechanics of microelectronics /

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Bibliographic Details
Main Author: Zhang, G. Q.
Corporate Author: SpringerLink (Online service)
Other Authors: Driel, W. D. van, Fan, X. J.
Format: eBook
Language:English
Published: Dordrecht : Springer, [2006]
Series:Solid mechanics and its applications ; v. 141.
Subjects:
Mechanical engineering.
Microelectronics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
State of the art report.
Physical Description:xiii, 563 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references.
ISBN:1402049358
9781402049354
DOI:10.1007/1-4020-4935-8