Force sensors for microelectronic packaging applications /
| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; London :
Springer,
2005.
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| Series: | Microtechnology and MEMS.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | viii, 178 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540269452 9783540269458 |
| DOI: | 10.1007/b138345 |