Gettering defects in semiconductors /

Bibliographic Details
Main Author:	Perevostchikov, V. A. (Viktor A.)
Corporate Author:	SpringerLink (Online service)
Other Authors:	Skupov, V. D. (Vladimir Dmitrievich)
Format:	eBook
Language:	English
Published:	Berlin ; New York : Springer, [2005]
Series:	Springer series in advanced microelectronics. 19.
Subjects:	Getters. Semiconductors > Materials. Semiconducteurs > Matériaux. Electronic books.
Online Access:	Connect to the full text of this electronic book Publisher description

Description
Item Description:	Electronic resource.
Physical Description:	xv, 386 pages : illustrations ; 25 cm.
Bibliography:	Includes bibliographical references (pages [343]-366) and indexes.
ISBN:	3540294996 9783540294993
ISSN:	1437-0387 ;
DOI:	10.1007/3-540-29499-6