rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electroceramic-based MEMS
    sub title: fabrication-technology and applications
  name:
    name part: Setter, N. (Nava)
    name part: 1949-
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: remote
    extent: xii, 414 pages : illustrations ; 25 cm.
  note: edited by Nava Setter.
  note: Electronic resource.
  note: Electronic reproduction. New York : Springer, 2008. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Jan. 30, 2008). Access may be restricted to users at subscribing institutions.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
  classification: TK7875 .E42 2005eb
  classification: 621.381
  related item:
    identifier: (DLC) 2004058924
    identifier: (OCoLC)56527238
  related item:
    title info:
      title: Electronic materials: science & technology
  identifier: 0387233199
  identifier: 9780387233192
  identifier: 978-0-387-23310-9 Springer
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: GW5XE
    record creation date: 080226
    record change date: 20210817090738.0
    record identifier: in00002468045