Fabrication and testing of a novel MEMS rotational thermal actuator /

Bibliographic Details

Main Author:	Gee, Danny
Corporate Author:	U.S. Army Research Laboratory
Other Authors:	Currano, Luke
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2007]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 4315.
Subjects:	Microelectromechanical systems. Lasers.
Online Access:	https://purl.fdlp.gov/GPO/LPS109769