Fabrication and testing of a novel MEMS rotational thermal actuator /

Bibliographic Details
Main Author: Gee, Danny
Corporate Author: U.S. Army Research Laboratory
Other Authors: Currano, Luke
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, [2007]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 4315.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/LPS109769

MARC

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245 1 0 |a Fabrication and testing of a novel MEMS rotational thermal actuator /  |c Danny Gee and Luke Currano. 
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300 |a iv, 16 pages :  |b digital, PDF file. 
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513 |a Final;  |b May to August 2007. 
500 |a Title from title screen (viewed March 5, 2009). 
500 |a "November 2007." 
504 |a Includes bibliographical references (page 13). 
500 |a Electronic resource. 
650 0 |a Microelectromechanical systems. 
650 0 |a Lasers. 
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710 2 |a U.S. Army Research Laboratory. 
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