Vacuum technology : practice for scientific instruments /

Bibliographic Details
Main Author: Yoshimura, Nagamitsu
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin : Springer, [2008]
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:x, 353 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540744339
9783540744337
DOI:10.1007/978-3-540-74433-7