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High dielectric constant materials : VLSI MOSFET applications /

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Gilmer, D. C. (David C.), Huff, Howard R.
Format: eBook
Language:English
Published: Berlin ; New York : Springer, 2005.
Series:Springer series in advanced microelectronics. 16.
Subjects:
Dielectrics.
Gate array circuits > Materials > Congresses.
Integrated circuits > Very large scale integration > Materials.
Metal oxide semiconductor field-effect transistors > Materials.
Semiconductors > Materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xxiv, 710 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540264620
9783540264620
ISSN:1437-0387 ;
DOI:10.1007/b137574