Scaling issues and design of MEMS /
| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
[2007]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book Contributor biographical information Publisher description Table of contents only |
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