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Scaling issues and design of MEMS /

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Bibliographic Details
Main Author: Baglio, S. (Salvatore)
Corporate Author: Wiley InterScience (Online service)
Other Authors: Castorina, Salvatore, Savalli, Nicolò
Format: eBook
Language:English
Published: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Subjects:
Microelectromechanical systems > Design and construction.
Electronic books.
Online Access:Connect to the full text of this electronic book
Contributor biographical information
Publisher description
Table of contents only
Description
Item Description:Electronic resource.
Physical Description:xiii, 229 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0470034076
9780470034071
DOI:10.1002/9780470034071