Silicon devices and process integration : deep submicron and nano-scale technologies /
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| Format: | eBook |
| Language: | English |
| Published: |
New York, NY :
Springer Science+Business Media,
2009.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xxv, 597 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0387690107 9780387690100 |
| DOI: | 10.1007/978-0-387-69010-0 |