Nanofabrication : principles, capabilities and limits /
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin :
Springer,
2008.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xii, 343 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0387755772 9780387755779 |
| DOI: | 10.1007/978-0-387-75577-9 |