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Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /

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Bibliographic Details
Main Author: Ostrikov, K. (Kostya)
Format: Book
Language:English
Published: Weinheim : Wiley-VCH ; [2008]
Subjects:
Nanostructured materials.
Plasma engineering.
Low temperature plasmas.
Description
Physical Description:xxv, 538 pages : illustrations (some color) ; 25 cm.
Bibliography:Includes bibliographical references (pages 499-527) and index.
ISBN:9783527407408 (hbk.)
3527407405 (hbk.)