Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany /
| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Stafa-Zurich, Switzerland ; United Kingdom ; Enfield, NH :
Trans-Tech Publications,
[2008]
|
| Series: | Materials science forum.
v. 573-574. |
| Subjects: |
| Physical Description: | xvi, 432 pages : iil. ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0878493913 9780878493913 |
| ISSN: | 0255-5476 ; |