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Chemical vapour deposition : precursors, processes and applications /

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Bibliographic Details
Other Authors: Jones, Anthony C., Hitchman, Michael L.
Format: Book
Language:English
Published: Cambridge, UK : Royal Society of Chemistry, [2009]
Subjects:
Chemical vapor deposition.
Description
Physical Description:xv, 582 pages : illustrations, plans ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780854044658 (hbk.)
0854044655 (hbk.)