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Microsystem technology /

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Bibliographic Details
Main Author: Menz, W. (Wolfgang)
Corporate Author: NetLibrary, Inc
Other Authors: Mohr, J. (Jürgen), Paul, Oliver
Format: eBook
Language:English
Published: Weinheim ; New York : Wiley-VCH, 2001.
Subjects:
Microelectronics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xii, 500 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [465]-483) and index.
ISBN:9783527613014 (electronic bk.)
3527613013 (electronic bk.)