http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Use of very-high-frequency plasmas to prepare a-Si:H-based triple-junction solar cells at high deposition rates
annual technical status report, 11 March 1998-11 March 1999
Use of very high frequency plasmas to prepare a-Si:H-based triple-junction solar cells at high deposition rates
National Renewable Energy Laboratory (U.S.)
Title from title screen (viewed June 20, 2008).
Mode of access: Internet from the NREL web site. Address as of 6/20/08: http://www.nrel.gov/docs/fy99osti/26795.pdf ; current access available via PURL.
Plasma-enhanced chemical vapor deposition
Use of very-high-frequency plasma to prepare a-Si:H-based triple-junction solar cells at high deposition rates