rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Use of very-high-frequency plasmas to prepare a-Si:H-based triple-junction solar cells at high deposition rates
    sub title: annual technical status report, 11 March 1998-11 March 1999
  title info:
    title: Use of very high frequency plasmas to prepare a-Si:H-based triple-junction solar cells at high deposition rates
  name:
    name part: Jones, S. J.
  name:
    name part: National Renewable Energy Laboratory (U.S.)
  type of resource: text
  origin info:
    place:
      place term: cou
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    extent: 29 pages : digital, PDF file.
  note: S.J. Jones [and others].
  note: Title from title screen (viewed June 20, 2008).
  note: "September 1999."
  note: "Subcontractor report."
  note: Electronic resource.
  note: Mode of access: Internet from the NREL web site. Address as of 6/20/08: http://www.nrel.gov/docs/fy99osti/26795.pdf ; current access available via PURL.
  subject:
    topic: Photovoltaic cells
    topic: Research
  subject:
    topic: Solar cells
  subject:
    topic: Thin films
  subject:
    topic: Plasma-enhanced chemical vapor deposition
  classification: E 9.18:NREL/SR-520-26795
  related item:
    title info:
      title: Use of very-high-frequency plasma to prepare a-Si:H-based triple-junction solar cells at high deposition rates
    physical description:
      extent: 29 p.
    identifier: (OCoLC)44490445
  related item:
    title info:
      title: NREL/SR ; 520-26795
  identifier: https://purl.fdlp.gov/GPO/LPS95673
  record info:
    record content source: GPO
    record creation date: 080620
    record change date: 20211129160201.0
    record identifier: in00002409524