Contamination and ESD control in high technology manufacturing /
| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, N.J. :
John Wiley & Sons : IEEE Press,
[2006]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xvi, 498 pages : illustrations ; 26 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0470007788 (electronic bk.) 0471414522 (print ed.) 9780470007785 (electronic bk.) 9780471414520 (print ed.) |
| DOI: | 10.1002/0470007788 |