Contamination and ESD control in high technology manufacturing /

Bibliographic Details
Main Author: Welker, R. W.
Corporate Author: John Wiley & Sons
Other Authors: Nagarajan, R. (Ramamurthy), Newberg, Carl E.
Format: eBook
Language:English
Published: Hoboken, N.J. : John Wiley & Sons : IEEE Press, [2006]
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xvi, 498 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0470007788 (electronic bk.)
0471414522 (print ed.)
9780470007785 (electronic bk.)
9780471414520 (print ed.)
DOI:10.1002/0470007788