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Journal of micro/nanolithography, MEMS, and MOEMS : JM³.

Bibliographic Details
New Title:Journal of micro/nanopatterning, materials, and metrology
Previous Title:Journal of microlithography, microfabrication, and microsystems
Uniform Title:Journal of micro/nanolithography, MEMS, and MOEMS (Online)
Corporate Author: Society of Photo-optical Instrumentation Engineers
Format: Journal
Language:English
Published: [Bellingham, Wash.] : SPIE-The International Society of Optical Engineering, [2007-2020]
Subjects:
Nanolithography > Periodicals.
Microelectronics > Periodicals.
Microlithography > Periodicals.
Microfabrication > Periodicals.
Online Availability: Check for online availability
Description
Published:Began with: Vol. 6, issue 1 (Jan./Mar. 2007).
Ceased with: Vol 19, no. 4 (October 2020).
Item Description:Electronic resource.
Physical Description:1 online resource
Publication Frequency:Quarterly
Format:Mode of access: World Wide Web.
ISSN:1932-5134
1932-5150
2708-8340 w (OCoLC)1249108189