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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. (Michael A.)
Corporate Author: John Wiley & Sons
Other Authors: Lichtenberg, Allan J.
Format: eBook
Language:English
Published: Hoboken, N.J. : Wiley, 2005.
Edition:2nd ed.
Subjects:
Plasma chemistry > Industrial applications.
Plasma dynamics.
Plasma etching.
Thin films > Surfaces.
Electronic Materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
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by Lieberman, M. A. (Michael A.)
Published 2005
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by Lieberman, M. A. (Michael A.)
Published 1994
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