Principles of plasma discharges and materials processing /

Bibliographic Details
Main Author:	Lieberman, M. A. (Michael A.)
Corporate Author:	John Wiley & Sons
Other Authors:	Lichtenberg, Allan J.
Format:	eBook
Language:	English
Published:	Hoboken, N.J. : Wiley, 2005.
Edition:	2nd ed.
Subjects:	Plasma chemistry > Industrial applications. Plasma dynamics. Plasma etching. Thin films > Surfaces. Electronic Materials. Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Electronic resource.
Physical Description:	xxxv, 757 pages : illustrations ; 25 cm.
Bibliography:	Includes bibliographical references (pages 735-748) and index.
ISBN:	0471720011 (acid-free paper) 0471724254 (electronic bk.) 9780471720010 (acid-free paper) 9780471724254 (electronic bk.)
DOI:	10.1002/0471724254