Semiconductor manufacturing technology /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hackensack, N.J. ; London :
World Scientific,
[2008]
|
| Series: | Advanced series in electrical and computer engineering ;
v. 13. |
| Subjects: |
| Physical Description: | xii, 470 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9789812568236 9812568239 |