Yoo, C. S. (2008). Semiconductor manufacturing technology. World Scientific.
Chicago Style (17th ed.) CitationYoo, Chue San. Semiconductor Manufacturing Technology. Hackensack, N.J. ; London: World Scientific, 2008.
MLA (9th ed.) CitationYoo, Chue San. Semiconductor Manufacturing Technology. World Scientific, 2008.
Warning: These citations may not always be 100% accurate.