rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Design for manufacturability through design-process integration II
    sub title: 28-29 February 2008, San Jose, California, USA
  title info:
    title: Design for manufacturability through design-process integration two
  title info:
    title: Design for manufacturability through design-process integration 2
  name:
    name part: Singh, Vivek K.
  name:
    name part: Rieger, Michael L.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: International SEMATECH
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2008
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 1 volume (various pagings) : illustrations ; 28 cm.
  note: Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA).
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Defects
    topic: Analysis
    genre: Congresses
  subject:
    topic: Semiconductors
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Semiconductor wafers
    topic: Defects
    topic: Analysis
    genre: Congresses
  subject:
    topic: Microelectronics industry
    topic: Quality control
    genre: Congresses
  subject:
    topic: Quality control
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 6925
  identifier: 9780819471109
  identifier: 0819471100
  identifier: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6925.toc
  related item:
    location:
      url: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6925.toc
  record info:
    record content source: SCW
    record creation date: 080528
    record change date: 20230420204320.6
    record identifier: in00002393075