rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Optical microlithography XXI
    sub title: 26-29 February 2008, San Jose, California, USA
  title info:
    title: Optical microlithography twenty-one
  title info:
    title: Optical microlithography 21
  name:
    name part: Levinson, Harry J.
  name:
    name part: Dusa, Mircea V.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: International SEMATECH
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2008
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 3 volumes (various pagings) : illustrations (some color) ; 28 cm.
  note: Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA).
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Masks
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  subject:
    topic: X-ray lithography
    genre: Congresses
  subject:
    topic: Manufacturing processes
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 6924
  identifier: 9780819471093
  identifier: 0819471097
  identifier: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6924.toc
  related item:
    location:
      url: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6924.toc
  record info:
    record content source: SCW
    record creation date: 080528
    record change date: 20230420205324.6
    record identifier: in00002393073