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Introduction to microsystem technology : a guide for students /

Bibliographic Details
Main Author: Gerlach, Gerald
Other Authors: Dötzel, Wolfram
Format: Book
Language:English
Published: Chichester, England ; Hoboken, N.J. : John Wiley & Sons, [2008]
Series:Wiley microsystem and nanotechnology series.
Subjects:
Microelectromechanical systems > Design and construction.
System design.
Microelectronics.
Online Access:Table of contents only
Description
Item Description:Translated from the German.
Physical Description:xxiii, 351 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780470058619 (cloth)
0470058617 (cloth)