rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Dielectric films for advanced microelectronics
  name:
    name part: Baklanov, Mikhail
    role:
      role term: editor.
  name:
    name part: Green, Martin
    role:
      role term: editor.
  name:
    name part: Maex, Karen
    role:
      role term: editor.
  name:
    name part: Wiley InterScience (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: enk
    date issued: 2007
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: remote
    extent: xxii, 486 pages : illustrations ; 26 cm.
  note: edited by Mikhail Baklanov, Martin Green, and Karen Maex.
  note: Electronic resource.
  note: Electronic reproduction. Hoboken, N.J. : Wiley InterScience, 2007. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Apr. 24, 2007). Access may be restricted to users at subscribing institutions.
  note: Includes bibliographical references and index.
  subject:
    topic: Dielectric films
  subject:
    topic: Microelectronics
    topic: Materials
  classification: TK7871.15.F5 D54 2007eb
  classification: 621.381
  related item:
    identifier: (DLC) 2006030740
    identifier: (OCoLC)71581699
  related item:
    title info:
      title: Wiley series in materials for electronic and optoelectronic applications
  identifier: 0470017945
  identifier: 9780470017944
  identifier: 10.1002/9780470017944 Wiley InterScience
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: DG1
    record creation date: 070425
    record change date: 20210810090836.0
    record identifier: in00002388774