http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Dielectric films for advanced microelectronics
xxii, 486 pages : illustrations ; 26 cm.
edited by Mikhail Baklanov, Martin Green, and Karen Maex.
Electronic reproduction. Hoboken, N.J. : Wiley InterScience, 2007. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Apr. 24, 2007). Access may be restricted to users at subscribing institutions.
Includes bibliographical references and index.
Wiley series in materials for electronic and optoelectronic applications