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MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Boston University. Photonics Center
Other Authors:	Dickensheets, David L., Schenk, Harald, 1948-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2008]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6887.
Subjects:	Microelectromechanical systems > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optical scanners > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6887.toc

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