Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim ; [Chichester?] :
Wiley-VCH,
[2005]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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Published 2005
Conference Proceeding
Book