Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /

Bibliographic Details
Corporate Author: Wiley InterScience (Online service)
Other Authors: Koenders, Ludger, Wilkening, Günter
Format: eBook
Language:English
Published: Weinheim ; [Chichester?] : Wiley-VCH, [2005]
Subjects:
Online Access:Connect to the full text of this electronic book
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Published 2005
Conference Proceeding Book