Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /

Bibliographic Details
Corporate Author: Wiley InterScience (Online service)
Other Authors: Koenders, Ludger, Wilkening, Günter
Format: eBook
Language:English
Published: Weinheim ; [Chichester?] : Wiley-VCH, [2005]
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Conference proceedings.
Electronic resource.
Physical Description:xxii, 519 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527606661
9783527606665
DOI:10.1002/3527606661