Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim ; [Chichester?] :
Wiley-VCH,
[2005]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Conference proceedings. Electronic resource. |
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| Physical Description: | xxii, 519 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3527606661 9783527606665 |
| DOI: | 10.1002/3527606661 |