Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[2008]
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| Series: | Materials Research Society symposia proceedings ;
v. 1052. |
| Subjects: |
| Item Description: | "This proceedings reports on research presented at Symposium DD, 'Microelectromechanical systems-- Materials and Devices' held November 26-28 at the 2007 MRS Fall Meeting in Boston, Massachusetts."--P. xi. Previous conference proceedings entitled: Materials science of microelectromechanical systems (MEMS) devices symposium. |
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| Physical Description: | [xiv], 325 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9781558999909 1558999906 |