rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Reliability of MEMS
  name:
    name part: Tsuchiya, Toshiyuki.
  name:
    name part: Tabata, Osamu
    name part: 1956-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2008
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xx, 303 pages : illustrations ; 25 cm.
  note: edited by Osamu Tabata and Toshiyuki Tsuchiya.
  note: "Testing of materials and devices"--Cover.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    topic: Reliability
  classification: TK7875 .R437 2008
  classification: 621.381
  related item:
    title info:
      title: Advanced micro & nanosystems ; v.6
  identifier: 9783527314942
  identifier: 3527314946
  record info:
    record content source: SISPL
    record creation date: 080108
    record change date: 20151109040951.0
    record identifier: in00002375219