Piezoelectric multilayer beam bending actuators : static and dynamic behavior and aspects of sensor integration /
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
2007.
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| Series: | Microtechnology and MEMS.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xiv, 358 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540326421 9783540326427 |
| ISSN: | 1439-6599 |
| DOI: | 10.1007/978-3-540-32642-7 |