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Handbook of silicon wafer cleaning technology /

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Bibliographic Details
Other Authors: Reinhardt, Karen A., Kern, Werner, 1925-
Format: Book
Language:English
Published: Norwich, NY : William Andrew, [2008]
Edition:2nd ed.
Series:Materials science and process technology series.
Subjects:
Silicon-on-insulator technology.
Description
Physical Description:xxvi, 718 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780815515548
0815515545