Surfaces, interfaces, and thin films for microelectronics /

Bibliographic Details
Main Author:	Irene, Eugene A.
Format:	Book
Language:	English
Published:	Hoboken, N.J. : Wiley-Interscience, [2008]
Subjects:	Surface chemistry. Interfaces (Physical sciences) Thin films. Microelectronics > Materials.
Online Access:	Table of contents only Publisher description Contributor biographical information

Description
Physical Description:	xiii, 515 pages : illustrations ; 25 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	9780470174470 (cloth) 0470174471 (cloth)